HD Series
Based on the original screw pumping designs that established the superior performance of LOT dry vacuum pumps, the Dura-Dry line provides world class performance in the harshest Semiconductor CVD and Deep Trench Etch applications.
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HD120 Hybrid Screw Pump
- 2000 l/m Pumping Speed
- < 5x10^-3 ... Ultimate Pressure
- ISO 63KF Inlet Flange
HD1200 Hybrid Screw Pump
- 18920 l/m Pumping Speed
- < 5x10^-3 ... Ultimate Pressure
- ISO 100K Inlet Flange
HD1855 Hybrid Screw Pump
- 30006 l/m Pumping Speed
- < 5x10^-3 ... Ultimate Pressure
- ISO 160KF Inlet Flange
HD600 Hybrid Screw Pump
- 11336 l/m Pumping Speed
- < 5x10^-3 ... Ultimate Pressure
- ISO 63KF Inlet Flange