GD Series
The GD Series builds upon the proven Dura-Dry dual screw design introduced by LOT Vacuum in 2002 and provides world class conservation of operating resources. The GD Series is well suited for demanding applications in Flat Panel Display, OLED / LED, Solar PV, and 450mm Semiconductor manufacturing. Both harsh duty CVD Process configurations and Transfer / Load Lock configurations are available.
Visit www.lotvacuumamerica.com for more information and product documentation.
GD3000 Split-flow Hybrid Screw Pump
- 50000 l/m Pumping Speed
- < 9x10^-4 ... Ultimate Pressure
- ISO250K Inlet Flange
GD400 Split-flow Hybrid Screw Pump
- 6000 l/m Pumping Speed
- < 9x10^-3 ... Ultimate Pressure
- ISO100K Inlet Flange
GD4000 Split-flow Hybrid Screw Pump
- 67000 l/m Pumping Speed
- < 9x10^-4 ... Ultimate Pressure
- ISO250K Inlet Flange