DD105 Series
Based on the original screw pumping designs that established the superior performance of LOT dry vacuum pumps, the Dura-Dry line provides world class performance in the harshest Semiconductor CVD and Deep Trench Etch applications.
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DD105 DuraDry Pump
- 1750 l/m Pumping Speed
- < 5x10^-3 ... Ultimate Pressure
- ISO63K Inlet Flange
DD1205 DuraDry Pump
- 13503 l/m Pumping Speed
- < 6x10^-4 ... Ultimate Pressure
- ISO100K Inlet Flange
DD2005 DuraDry Pump
- 33673 l/m Pumping Speed
- < 5x10^-4 ... Ultimate Pressure
- ISO160K Inlet Flange
DD605 DuraDry Pump
- 8002 l/m Pumping Speed
- < 6x10^-4 ... Ultimate Pressure
- ISO63K Inlet Flange